According to reports, a team from A * STAR, a microelectronics research institute in Singapore, produced a small sensor. The team's main goal is to produce an implantable micro-medical device. Extensive circuit research and testing. This sensor combines a stable diaphragm and easily-sensing silicon nanowires, making the MEMS pressure sensor more stable and durable for medical devices.

In principle, designing a small pressure sensor is very simple: a pressure deformable diaphragm is embedded in a varistor. This varistor must be made of silicon nanowires, etc., which will cause resistance changes due to pressure Made of materials. But in fact, there will be problems, including circuit design and fragile components. Any mistakes are fatal to commercial sensors.

Since this diaphragm must transmit very small pressure changes to the varistor, and at the same time resist deformation and breakage, the choice of this diaphragm material is crucial. So Luo and his colleagues thought of using silica to demonstrate perfect pressure sensing performance. However, although silicon dioxide has superior sensing performance, it cannot overcome the weakness of flexibility. Therefore, Luo changed the solution to use double-layered silicon dioxide, and put the piezoresistive silicon nanowires in the middle of the two, plus a layer of silicon nitride with stable performance on the top layer.

By etching silicon nitride and varying the thickness and adjusting the silicon nanowires, the team finally found the optimal combination. The final sensor successfully meets the resistance to deformation and mechanical damage while still providing a linear change in electrical output under pressure sensing, meeting the requirements of high-precision medical devices.

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